Hochschulschrift | Online-Publikation
Stress and microstructure of sputter deposited thin copper and niobium films
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Sprache
-
Englisch
- Anmerkungen
-
Zugl.: Stuttgart, Univ., Diss., 2003
- Erschienen in
-
Bericht / Max-Planck-Institut für Metallforschung ; Nr. 132
- Klassifikation
-
Physik
- Schlagwort
-
Metallschicht
Sputtern
Mechanische Spannung
Texturanalyse
Röntgenbeugung
Elastische Spannung / Messung ; Mikrostruktur ; Textur ; Röntgenbeugung
- Ereignis
-
Veröffentlichung
- (wo)
-
Stuttgart
- (wer)
-
Max-Planck-Inst. für Metallforschung
- (wann)
-
2003
- Urheber
- URN
-
urn:nbn:de:bsz:93-opus-14135
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
16.05.1970, 00:47 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Objekttyp
- Hochschulschrift
- Online-Publikation
Beteiligte
- Okolo, Brando Chidi
- Max-Planck-Inst. für Metallforschung
Entstanden
- 2003
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