Konferenzschrift | Kongress
EMLC 2005 : lectures held at the GMM conference, January 31 - February 03, 2005 in Dresden, Germany
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783800728756
3800728753
- Maße
-
30 cm
- Umfang
-
297 S.
- Sprache
-
Englisch
- Anmerkungen
-
Ill., graph. Darst.
Literaturangaben
- Erschienen in
-
GMM-Fachbericht / Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik ; 45
- Klassifikation
-
Ingenieurwissenschaften und Maschinenbau
- Schlagwort
-
Maskentechnik
Fotolithografie
- Ereignis
-
Veröffentlichung
- (wo)
-
Berlin, Offenbach
- (wer)
-
VDE-Verl.
- (wann)
-
2005
- Beteiligte Personen und Organisationen
- Inhaltsverzeichnis
- Rechteinformation
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Letzte Aktualisierung
-
11.06.2025, 13:45 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Objekttyp
- Konferenzschrift
- Kongress
Beteiligte
- Behringer, Uwe
- EMLC (21 : 2005 : Dresden)
- VDE-Verl.
Entstanden
- 2005
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