MEMS-compatible structuring of liquid crystal network actuators using maskless photolithography

Abstract: We present a method to structure liquid crystal network actuators based on selectively polymerizing the network without any physical or hard masks in a process compatible with microelectromechanical system (MEMS) technology. The standard glass-cell filling technique is used to generate the actuator films; subsequently, selected areas are exposed to light and thus polymerized to structure the actuators. No further machining, such as laser cutting, is necessary. The polymerization pattern is defined by projection using a digital micromirror device-based optomechanical setup, with a resolution ranging from 1 to 2 mm. These processes are used to structure photothermally and photochemically stimulated actuators, which may thus be fabricated with high throughput and easily integrated with MEMS devices

Angaben zum Objekt

• Standort: Deutsche Nationalbibliothek Frankfurt am Main
• Umfang: Online-Ressource
• Sprache: Englisch
• Anmerkungen: Smart materials and structures. - 31, 11 (2022) , 115014, ISSN: 1361-665X

Klassifikation und Themen

• Klassifikation: Elektrotechnik, Elektronik

Beteiligte, Orts- und Zeitangaben

• Ereignis: Veröffentlichung
• (wo): Freiburg
• (wer): Universität
• (wann): 2022
• Urheber: Lall, Jasleen ; Zappe, Hans P.

Weitere Informationen

• DOI: 10.1088/1361-665x/ac95e5
• URN: urn:nbn:de:bsz:25-freidok-2302703
• Rechteinformation: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
• Letzte Aktualisierung: 25.03.2025, 13:41 MEZ