- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
Ulm, Universität Ulm, Dissertation, 2021
- Klassifikation
-
Elektrotechnik, Elektronik
- Schlagwort
-
Cantilevers
Microfabrication
Photolithography
Microtechnology
Kantilever
Fotolithografie
Mikrosystemtechnik
- DOI
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10.18725/OPARU-38996
- URN
-
urn:nbn:de:bsz:289-oparu-39072-1
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:44 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Nilsen, Madeleine
- Universität Ulm
Entstanden
- 2021
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