- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
Ulm, Universität Ulm, Dissertation, 2021
- Classification
-
Elektrotechnik, Elektronik
- Keyword
-
Cantilevers
Microfabrication
Photolithography
Microtechnology
Kantilever
Fotolithografie
Mikrosystemtechnik
- DOI
-
10.18725/OPARU-38996
- URN
-
urn:nbn:de:bsz:289-oparu-39072-1
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:44 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Nilsen, Madeleine
- Universität Ulm
Time of origin
- 2021
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