Automatic beam optimization method for scanning electron microscopy based on electron beam Kernel estimation

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
1 Online-Ressource.
Language
Englisch

Bibliographic citation
Automatic beam optimization method for scanning electron microscopy based on electron beam Kernel estimation ; volume:3 ; number:1 ; day:20 ; month:6 ; year:2024 ; pages:1-15 ; date:12.2024
Communications engineering ; 3, Heft 1 (20.6.2024), 1-15, 12.2024

Classification
Elektrotechnik, Elektronik

Creator
Cho, Yunje
Cho, Junghee
Park, Jonghyeok
Wang, Jeonghyun
Jeong, Seunggyo
Lee, Jubok
Hwang, Yun
Kim, Jiwoong
Yu, Jeongwoo
Chung, Heesu
Park, Hyenok
Shon, Subong
Jo, Taeyong
Lee, Myungjun
Kim, Kwangrak
Contributor
SpringerLink (Online service)

DOI
10.1038/s44172-024-00230-3
URN
urn:nbn:de:101:1-2409160934057.241881157566
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:25 AM CEST

Data provider

This object is provided by:
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Associated

  • Cho, Yunje
  • Cho, Junghee
  • Park, Jonghyeok
  • Wang, Jeonghyun
  • Jeong, Seunggyo
  • Lee, Jubok
  • Hwang, Yun
  • Kim, Jiwoong
  • Yu, Jeongwoo
  • Chung, Heesu
  • Park, Hyenok
  • Shon, Subong
  • Jo, Taeyong
  • Lee, Myungjun
  • Kim, Kwangrak
  • SpringerLink (Online service)

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