Selective surface modification of lithographic silicon oxide nanostructures by organofunctional silanes
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Erschienen in
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Selective surface modification of lithographic silicon oxide nanostructures by organofunctional silanes ; volume:4 ; pages:218-226
Beilstein journal of nanotechnology ; 4, 218-226
- Klassifikation
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Ingenieurwissenschaften und Maschinenbau
- DOI
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10.3762/bjnano.4.22
- URN
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urn:nbn:de:101:1-2013062610797
- Rechteinformation
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Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
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14.08.2025, 11:02 MESZ
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