- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource, 1 online resource.
- Sprache
-
Englisch
- Erschienen in
-
CMOS compatible 2T pixel for on-wafer in-situ EUV detection ; volume:18 ; number:1 ; day:20 ; month:6 ; year:2023 ; pages:1-10 ; date:12.2023
Discover nano ; 18, Heft 1 (20.6.2023), 1-10, 12.2023
- Urheber
-
Lin, Wei-Hwa
Huang, Han-Lin
Wu, Pin-Jiun
Lin, Chrong-Jung
King, Ya-Chin
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
-
10.1186/s11671-023-03836-2
- URN
-
urn:nbn:de:101:1-2023092209244098443048
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:51 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Beteiligte
- Lin, Wei-Hwa
- Huang, Han-Lin
- Wu, Pin-Jiun
- Lin, Chrong-Jung
- King, Ya-Chin
- SpringerLink (Online service)
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