Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
1 Online-Ressource.
Language
Englisch

Bibliographic citation
Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers ; volume:634 ; number:8032 ; day:18 ; month:9 ; year:2024 ; pages:74-79 ; date:10.2024
Nature ; 634, Heft 8032 (18.9.2024), 74-79, 10.2024

Creator
Damme, J. Van
Massar, S.
Acharya, R.
Ivanov, Ts
Perez Lozano, D.
Canvel, Y.
Demarets, M.
Vangoidsenhoven, D.
Hermans, Y.
Lai, J. G.
Vadiraj, A. M.
Mongillo, M.
Wan, D.
Boeck, J. De
Potočnik, A.
Greve, K. De
Contributor
SpringerLink (Online service)

DOI
10.1038/s41586-024-07941-9
URN
urn:nbn:de:101:1-2501022130184.774992396764
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:24 AM CEST

Data provider

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Associated

  • Damme, J. Van
  • Massar, S.
  • Acharya, R.
  • Ivanov, Ts
  • Perez Lozano, D.
  • Canvel, Y.
  • Demarets, M.
  • Vangoidsenhoven, D.
  • Hermans, Y.
  • Lai, J. G.
  • Vadiraj, A. M.
  • Mongillo, M.
  • Wan, D.
  • Boeck, J. De
  • Potočnik, A.
  • Greve, K. De
  • SpringerLink (Online service)

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