Metal-ion subplantation : A game changer for controlling nanostructure and phase formation during film growth by physical vapor deposition
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: 10.1063/1.5141342
- Ereignis
-
Veröffentlichung
- (wo)
-
Aachen
- (wer)
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Universitätsbibliothek der RWTH Aachen
- (wann)
-
2020
- Urheber
- DOI
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10.18154/RWTH-2020-05264
- URN
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urn:nbn:de:101:1-2021090706245422811986
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:20 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Greczynski, Grzegorz
- Mráz, Stanislav
- Schneider, Jochen M.
- Hultman, L.
- Universitätsbibliothek der RWTH Aachen
Entstanden
- 2020
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