Werke:
- Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films
- Stoichiometric Cr2AlC MAX phase coatings deposited by HPPMS from composite targets using industrial deposition technology
- Correlative Experimental and Theoretical Investigation of the Angle-Resolved Composition Evolution of Thin Films Sputtered from a Compound Mo2BC Target
- Metal-ion subplantation : A game changer for controlling nanostructure and phase formation during film growth by physical vapor deposition