Metal-ion subplantation : A game changer for controlling nanostructure and phase formation during film growth by physical vapor deposition
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: 10.1063/1.5141342
- Event
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Veröffentlichung
- (where)
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Aachen
- (who)
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Universitätsbibliothek der RWTH Aachen
- (when)
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2020
- Creator
- DOI
-
10.18154/RWTH-2020-05264
- URN
-
urn:nbn:de:101:1-2021090706245422811986
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:54 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Greczynski, Grzegorz
- Mráz, Stanislav
- Schneider, Jochen M.
- Hultman, L.
- Universitätsbibliothek der RWTH Aachen
Time of origin
- 2020
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