Stability and spring constant investigation for micromachined inductive suspensions: theoretical analysis vs. experimental results
Abstract: We present a linear analytical model coupled with experimental analysis to discuss stability of a levitated proof mass (PM) in a micromachined inductive suspension (MIS), which has been previously introduced and characterized. The model is a function of the MIS geometry, describes the dynamics of a levitated disk-shaped PM near the equilibrium point, and predicts conditions for stable levitation. The experimental setup directly measures the lateral component of the Lorentz force, which has a stabilization role in the MIS structure, as well as the vertical levitation force. The experimental setup is further used to derive mechanical parameters such as stiffness values relative to lateral, vertical and angular displacements, proven to be in excellent agreement with the values predicted by the analytical model
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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Journal of physics. Conference Series. - 557 (2014) , 012133, ISSN: 1742-6588
- Event
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Veröffentlichung
- (where)
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Freiburg
- (who)
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Universität
- (when)
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2019
- Creator
- Contributor
- DOI
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10.1088/1742-6596/557/1/012133
- URN
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urn:nbn:de:bsz:25-freidok-1265700
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:26 AM CEST
Data provider
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Poletkin, Kirill
- Lu, Zhiqiu
- den Hartogh, B.
- Wallrabe, Ulrike
- Badilita, Vlad
- Albert-Ludwigs-Universität Freiburg. Professur für Mikroaktorik
- Universität
Time of origin
- 2019
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