Chemical Stability of IrO<sub>2</sub> Top Electrodes in Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>‐based MIM Structures : The Impact of Annealing Gas

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Standort
Deutsche Nationalbibliothek Frankfurt am Main
Umfang
Online-Ressource
Sprache
Englisch

Erschienen in
In: physica status solidi (RRL) : Rapid Research Letters ; 15 (2021), 5. - 2100027. - Wiley. - ISSN 1862-6254. - eISSN 1862-6270

Ereignis
Veröffentlichung
(wo)
Konstanz
(wer)
KOPS Universität Konstanz
(wann)
2021
Urheber
Szyjka, Thomas
Baumgarten, Lutz
Mittmann, Terence
Matveyev, Yury
Schlueter, Christoph
Mikolajick, Thomas
Schroeder, Uwe
Müller, Martina

URN
urn:nbn:de:bsz:352-2-1eyquhuhauuss5
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Letzte Aktualisierung
14.08.2025, 11:00 MESZ

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