High-Yield Wafer-Scale Self-Assembly of 3D Microelectronic Devices for Electron Optics
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
Chemnitz, Technische Universität Chemnitz, Dissertation, 2024
- Schlagwort
-
Mikroelektronik
Selbstorganisation
Elektronenstrahl
Mikrosystemtechnik
Mikromagnetismus
Fotolithografie
- Ereignis
-
Veröffentlichung
- (wo)
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Chemnitz
- (wer)
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Technische Universität Chemnitz
- (wann)
-
2025
- Urheber
- Beteiligte Personen und Organisationen
-
Schmidt, Oliver G.
Fery, Andreas
- URN
-
urn:nbn:de:bsz:ch1-qucosa2-951682
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:30 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Beteiligte
- Huber, Renato
- Schmidt, Oliver G.
- Fery, Andreas
- Technische Universität Chemnitz
Entstanden
- 2025
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