High-Yield Wafer-Scale Self-Assembly of 3D Microelectronic Devices for Electron Optics
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
Chemnitz, Technische Universität Chemnitz, Dissertation, 2024
- Keyword
-
Mikroelektronik
Selbstorganisation
Elektronenstrahl
Mikrosystemtechnik
Mikromagnetismus
Fotolithografie
- Event
-
Veröffentlichung
- (where)
-
Chemnitz
- (who)
-
Technische Universität Chemnitz
- (when)
-
2025
- Creator
- Contributor
-
Schmidt, Oliver G.
Fery, Andreas
- URN
-
urn:nbn:de:bsz:ch1-qucosa2-951682
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:30 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Huber, Renato
- Schmidt, Oliver G.
- Fery, Andreas
- Technische Universität Chemnitz
Time of origin
- 2025
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