Fabrication mechanism of friction-induced selective etching on Si(100) surface

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
1556-276X
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Fabrication mechanism of friction-induced selective etching on Si(100) surface ; volume:7 ; number:1 ; day:23 ; month:2 ; year:2012 ; pages:1-9 ; date:12.2012
Nanoscale research letters ; 7, Heft 1 (23.2.2012), 1-9, 12.2012

Creator
Guo, Jian
Song, Chenfei
Li, Xiaoying
Yu, Bingjun
Dong, Hanshan
Qian, Linmao
Zhou, Zhongrong
Contributor
SpringerLink (Online service)

DOI
10.1186/1556-276X-7-152
URN
urn:nbn:de:101:1-2021082720063601022819
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:53 AM CEST

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Associated

  • Guo, Jian
  • Song, Chenfei
  • Li, Xiaoying
  • Yu, Bingjun
  • Dong, Hanshan
  • Qian, Linmao
  • Zhou, Zhongrong
  • SpringerLink (Online service)

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