Hochschulschrift
Inverse Image Modeling for Defect Detection and Optical System Characterization
- Alternative title
-
Inverse Abbildungsmodelle für die Defektdetektion und die Charakterisierung optischer Systeme
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
Erlangen, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), Dissertation, 2016
- Classification
-
Physik
- Keyword
-
multilayer defect
defect reconstruction
image reconstruction techniques
inverse image modeling
computational lithography
phase retrieval
principal component analysis
artificial neural network
extreme ultraviolet lithography
- Event
-
Veröffentlichung
- (where)
-
Erlangen
- (who)
-
Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
- (when)
-
2016
- Creator
- Contributor
-
Erdmann, Andreas
- URN
-
urn:nbn:de:bvb:29-opus4-78954
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
- 14.08.2025, 10:52 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
- Xu, Dongbo
- Erdmann, Andreas
- Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
Time of origin
- 2016
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