Hochschulschrift
Inverse Image Modeling for Defect Detection and Optical System Characterization
- Weitere Titel
-
Inverse Abbildungsmodelle für die Defektdetektion und die Charakterisierung optischer Systeme
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
Erlangen, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), Dissertation, 2016
- Klassifikation
-
Physik
- Schlagwort
-
multilayer defect
defect reconstruction
image reconstruction techniques
inverse image modeling
computational lithography
phase retrieval
principal component analysis
artificial neural network
extreme ultraviolet lithography
- Ereignis
-
Veröffentlichung
- (wo)
-
Erlangen
- (wer)
-
Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
- (wann)
-
2016
- Urheber
- Beteiligte Personen und Organisationen
-
Erdmann, Andreas
- URN
-
urn:nbn:de:bvb:29-opus4-78954
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
- 14.08.2025, 10:52 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Objekttyp
- Hochschulschrift
Beteiligte
- Xu, Dongbo
- Erdmann, Andreas
- Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
Entstanden
- 2016
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