Hochschulschrift
Structure evolution, properties, and application of alumina films deposited by PECVD
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783832241766
3832241760
- Maße
-
21 cm, 212 gr.
- Umfang
-
III, 133 S.
- Sprache
-
Englisch
- Anmerkungen
-
Ill., graph. Darst.
Zugl.: Aachen, Techn. Hochsch., 2005
- Erschienen in
-
Materials chemistry dissertation ; No. 02
- Klassifikation
-
Chemie
- Schlagwort
-
Aluminiumoxide
Dünne Schicht
PECVD-Verfahren
Evolution
- Inhaltsverzeichnis
- Rechteinformation
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Letzte Aktualisierung
-
11.06.2025, 13:43 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Objekttyp
- Hochschulschrift
Beteiligte
- Kurapov, Denis
- Shaker
Entstanden
- 2005
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