A Coaxial Nozzle Attachment Improving the Homogeneity of the Gas Flow Sputtering
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: Coatings (14:3) - Basel : MDPI - Art.-Id. 279
- Ereignis
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Veröffentlichung
- (wo)
-
Berlin
- (wer)
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Technische Universität Berlin
- (wann)
-
2024
- Urheber
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Alktash, Nivin
Körner, Stefan
Liu, Tianhao
Pflug, Andreas
Szyszka, Bernd
Muydinov, Ruslan
- DOI
-
10.14279/depositonce-20234
- Handle
-
11303/21434
- URN
-
urn:nbn:de:101:1-2404240159051.532086420831
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:59 MESZ
Datenpartner
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Beteiligte
- Alktash, Nivin
- Körner, Stefan
- Liu, Tianhao
- Pflug, Andreas
- Szyszka, Bernd
- Muydinov, Ruslan
- Technische Universität Berlin
Entstanden
- 2024
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