Hochschulschrift | Online-Publikation
Investigation of ICP RF discharges by means of a Langmuir probe
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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Bochum, Univ., Diss., 2005
- Classification
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Physik
- Keyword
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Elektrostatische Welle
Elektronenverteilung
Faraday-Käfig
Hochfrequenzplasma
Rogowski-Spannungsmesser
Elektrostatische Welle
Elektronenverteilung
Faraday-Käfig
Hochfrequenzplasma
Rogowski-Spannungsmesser
- Creator
- URN
-
urn:nbn:de:hbz:294-12915
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:23 AM CEST
Data provider
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
- Online-Publikation
Associated
Other Objects (12)
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The chemical composition of RF discharges in methane : diagnostics and analysis
Electron heating in rf capacitive discharges at atmospheric-to-subatmospheric pressures
Oberflächenanalytik - Übungsaufgabe 6: Langmuir-Isotherme: Adsorption nach Langmuir - Sättigungsbelegung, Adsorptiv-Konzentration und Langmuir-Konstante
On the validity of the classical plasma conductivity in capacitive RF discharges
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Modeling of ICP reactive discharges and numerical investigation of related nonlinear phenomena
Impact of internal Faraday shields on RF driven hydrogen discharges
Langmuir, Irving
Langmuir, Irving
Negative ions and operation modes in capacitively coupled RF oxygen discharges
Negative Ions and Operation Modes in Capacitively Coupled RF Oxygen Discharges
The chemical composition of RF discharges in methane : diagnostics and analysis
Electron heating in rf capacitive discharges at atmospheric-to-subatmospheric pressures
Oberflächenanalytik - Übungsaufgabe 6: Langmuir-Isotherme: Adsorption nach Langmuir - Sättigungsbelegung, Adsorptiv-Konzentration und Langmuir-Konstante
On the validity of the classical plasma conductivity in capacitive RF discharges
Langmuir, Irving, Dr.
Langmuir, Irving, Dr.
Modeling of ICP reactive discharges and numerical investigation of related nonlinear phenomena
Impact of internal Faraday shields on RF driven hydrogen discharges
Langmuir, Irving
Langmuir, Irving
Negative ions and operation modes in capacitively coupled RF oxygen discharges
Negative Ions and Operation Modes in Capacitively Coupled RF Oxygen Discharges
The chemical composition of RF discharges in methane : diagnostics and analysis
Electron heating in rf capacitive discharges at atmospheric-to-subatmospheric pressures
Oberflächenanalytik - Übungsaufgabe 6: Langmuir-Isotherme: Adsorption nach Langmuir - Sättigungsbelegung, Adsorptiv-Konzentration und Langmuir-Konstante
On the validity of the classical plasma conductivity in capacitive RF discharges
Langmuir, Irving, Dr.