On the validity of the classical plasma conductivity in capacitive RF discharges
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: Plasma sources science and technology, 31, 10, Artikel 105013, S. 105013-1-105013-15
- Ereignis
-
Veröffentlichung
- (wo)
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Bochum
- (wer)
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Ruhr-Universität Bochum
- (wann)
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2022
- Urheber
-
Wang, Li
Vass, Máté
Lafleur, Trevor
Donkó, Zóltán
Song, Yuan-Hong
Schulze, Julian
- URN
-
urn:nbn:de:hbz:294-121602
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:35 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Wang, Li
- Vass, Máté
- Lafleur, Trevor
- Donkó, Zóltán
- Song, Yuan-Hong
- Schulze, Julian
- Ruhr-Universität Bochum
Entstanden
- 2022
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