PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: 10.1002/ppap.202300150
- Ereignis
-
Veröffentlichung
- (wo)
-
Aachen
- (wer)
-
Universitätsbibliothek der RWTH Aachen
- (wann)
-
2023
- Urheber
-
de los Arcos, Teresa
Awakowicz, Peter
Benedikt, Jan
Biskup, Beatrix
Böke, Marc
Boysen, Nils
Buschhaus, Rahel
Dahlmann, Rainer
Devi, Anjana
Gergs, Tobias
Jenderny, Jonathan
Keudell, Achim von
Kühne, Thomas D.
Kusmierz, Simon
Müller, Hendrik
Mussenbrock, Thomas
Trieschmann, Jan
Zanders, David
Zysk, Frederik
Grundmeier, Guido
- DOI
-
10.18154/RWTH-2023-10857
- URN
-
urn:nbn:de:101:1-2023112200392201422110
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:54 MEZ
Datenpartner
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Beteiligte
- de los Arcos, Teresa
- Awakowicz, Peter
- Benedikt, Jan
- Biskup, Beatrix
- Böke, Marc
- Boysen, Nils
- Buschhaus, Rahel
- Dahlmann, Rainer
- Devi, Anjana
- Gergs, Tobias
- Jenderny, Jonathan
- Keudell, Achim von
- Kühne, Thomas D.
- Kusmierz, Simon
- Müller, Hendrik
- Mussenbrock, Thomas
- Trieschmann, Jan
- Zanders, David
- Zysk, Frederik
- Grundmeier, Guido
- Universitätsbibliothek der RWTH Aachen
Entstanden
- 2023
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