Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: AIP advances, 11, 7, Artikel 075024, S. 075024-1-075024-14
- Ereignis
-
Veröffentlichung
- (wo)
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Bochum
- (wer)
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Ruhr-Universität Bochum
- (wann)
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2021
- Urheber
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Masheyeva, Ranna U.
Dzhumagulova, Karlygash N.
Myrzaly, Murat
Schulze, Felix Julian
Donko, Zoltan
- URN
-
urn:nbn:de:hbz:294-87970
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:55 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Masheyeva, Ranna U.
- Dzhumagulova, Karlygash N.
- Myrzaly, Murat
- Schulze, Felix Julian
- Donko, Zoltan
- Ruhr-Universität Bochum
Entstanden
- 2021
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