zweidimensionales bewegtes Bild
Unravelling the atomic scale chemistry of atomic level processing
- Location
-
Hannover TIB
- Extent
-
479MB, 00:49:29:04 (unknown)
- Language
-
Englisch
- Notes
-
Audiovisuelles Material
- Bibliographic citation
-
Beilstein Talks ; (Jan. 2023)
- Keyword
-
semiconductor device
alucone
Atomic Layer Deposition
simulation of plasma enhanced deposition
titanicone
atomistic simulations
thermal atomic layer etching
cobalt
- Event
-
Veröffentlichung
- (who)
-
Beilstein-Institut zur Förderung der Chemischen Wissenschaften
- (when)
-
2023-01-01
- Contributor
-
Nolan, Michael
- DOI
-
10.5446/65477
- Last update
-
04.12.2024, 8:09 AM CET
Data provider
This object is provided by:
Technische Informationsbibliothek (TIB). If you have any questions about the object, please contact the data provider.
Technische Informationsbibliothek (TIB). If you have any questions about the object, please contact the data provider.
Object type
- zweidimensionales bewegtes Bild
Associated
- Nolan, Michael
- Beilstein-Institut zur Förderung der Chemischen Wissenschaften
Time of origin
- 2023-01-01
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