zweidimensionales bewegtes Bild
Unravelling the atomic scale chemistry of atomic level processing
- Standort
-
Hannover TIB
- Umfang
-
479MB, 00:49:29:04 (unknown)
- Sprache
-
Englisch
- Anmerkungen
-
Audiovisuelles Material
- Erschienen in
-
Beilstein Talks ; (Jan. 2023)
- Schlagwort
-
semiconductor device
alucone
Atomic Layer Deposition
simulation of plasma enhanced deposition
titanicone
atomistic simulations
thermal atomic layer etching
cobalt
- Ereignis
-
Veröffentlichung
- (wer)
-
Beilstein-Institut zur Förderung der Chemischen Wissenschaften
- (wann)
-
2023-01-01
- Beteiligte Personen und Organisationen
-
Nolan, Michael
- DOI
-
10.5446/65477
- Letzte Aktualisierung
-
04.12.2024, 08:09 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
Technische Informationsbibliothek (TIB). Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Technische Informationsbibliothek (TIB). Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Objekttyp
- zweidimensionales bewegtes Bild
Beteiligte
- Nolan, Michael
- Beilstein-Institut zur Förderung der Chemischen Wissenschaften
Entstanden
- 2023-01-01
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