Atomic and Close-to-Atomic Scale Manufacturing: A Review on Atomic Layer Removal Methods Using Atomic Force Microscopy
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2520-8128
- Umfang
-
Online-Ressource
- Sprache
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Englisch
- Anmerkungen
-
online resource.
- Erschienen in
-
Atomic and Close-to-Atomic Scale Manufacturing: A Review on Atomic Layer Removal Methods Using Atomic Force Microscopy ; day:26 ; month:6 ; year:2020 ; pages:1-20
Nanomanufacturing and metrology ; (26.6.2020), 1-20
- Urheber
-
Mathew, Paven Thomas
Rodriguez, Brian J.
Fang, Fengzhou
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
-
10.1007/s41871-020-00067-2
- URN
-
urn:nbn:de:101:1-2020082723333392331564
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:49 MESZ
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Beteiligte
- Mathew, Paven Thomas
- Rodriguez, Brian J.
- Fang, Fengzhou
- SpringerLink (Online service)
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