Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology ; volume:10 ; pages:1523-1536
Beilstein journal of nanotechnology ; 10, 1523-1536
- Classification
-
Ingenieurwissenschaften und Maschinenbau
- DOI
-
10.3762/bjnano.10.150
- URN
-
urn:nbn:de:101:1-2020111914204038090038
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:31 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Other Objects (12)
Comparison of EUV Photomask Metrology Between CD-AFM and TEM
Correction: Comparison of EUV Photomask Metrology Between CD-AFM and TEM
Facile Fabrication of Spherical Nanoparticle‐Tipped AFM Probes for Plasmonic Applications
Small force metrology for AFM, stylus instruments, CMM and nanoindenter via reference springs and sensors
SEM and AFM studies of two-phase magnetic alkali borosilicate glasses
Combining simulation and optimization: Multipurpose modelling of camera-based optical metrology systems
Multifunctional nanoparticle-mediated combining therapy for human diseases
Direct measurement of electrostatic fields using single Teflon nanoparticle attached to AFM tip
Production metrology
Attosecond metrology
Mass metrology
Engineering metrology
Comparison of EUV Photomask Metrology Between CD-AFM and TEM
Correction: Comparison of EUV Photomask Metrology Between CD-AFM and TEM
Facile Fabrication of Spherical Nanoparticle‐Tipped AFM Probes for Plasmonic Applications
Small force metrology for AFM, stylus instruments, CMM and nanoindenter via reference springs and sensors
SEM and AFM studies of two-phase magnetic alkali borosilicate glasses
Combining simulation and optimization: Multipurpose modelling of camera-based optical metrology systems
Multifunctional nanoparticle-mediated combining therapy for human diseases
Direct measurement of electrostatic fields using single Teflon nanoparticle attached to AFM tip
Production metrology
Attosecond metrology
Mass metrology
Engineering metrology
Comparison of EUV Photomask Metrology Between CD-AFM and TEM
Correction: Comparison of EUV Photomask Metrology Between CD-AFM and TEM
Facile Fabrication of Spherical Nanoparticle‐Tipped AFM Probes for Plasmonic Applications
Small force metrology for AFM, stylus instruments, CMM and nanoindenter via reference springs and sensors
SEM and AFM studies of two-phase magnetic alkali borosilicate glasses
Combining simulation and optimization: Multipurpose modelling of camera-based optical metrology systems
Multifunctional nanoparticle-mediated combining therapy for human diseases
Direct measurement of electrostatic fields using single Teflon nanoparticle attached to AFM tip
Production metrology
Attosecond metrology
Mass metrology