Atomic-Layer-Deposition of Indium Oxide Nano-films for Thin-Film Transistors

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
1556-276X
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Atomic-Layer-Deposition of Indium Oxide Nano-films for Thin-Film Transistors ; volume:13 ; number:1 ; day:9 ; month:1 ; year:2018 ; pages:1-8 ; date:12.2018
Nanoscale research letters ; 13, Heft 1 (9.1.2018), 1-8, 12.2018

Classification
Ingenieurwissenschaften und Maschinenbau

Creator
Ma, Qian
Contributor
Zheng, He-Mei
Shao, Yan
Zhu, Bao
Liu, Wen-Jun
Ding, Shi-Jin
Zhang, David Wei
SpringerLink (Online service)

DOI
10.1186/s11671-017-2414-0
URN
urn:nbn:de:1111-201803011641
Rights
Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 11:00 AM CEST

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Associated

  • Ma, Qian
  • Zheng, He-Mei
  • Shao, Yan
  • Zhu, Bao
  • Liu, Wen-Jun
  • Ding, Shi-Jin
  • Zhang, David Wei
  • SpringerLink (Online service)

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