Atomic Layer Deposition of Nickel Using Ni(dmamb)2 and ZnO Adhesion Layer Without Plasma

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
1 Online-Ressource.
Language
Englisch

Bibliographic citation
Atomic Layer Deposition of Nickel Using Ni(dmamb)2 and ZnO Adhesion Layer Without Plasma ; volume:7 ; number:1 ; day:20 ; month:9 ; year:2024 ; pages:1-11 ; date:12.2024
Nanomanufacturing and metrology ; 7, Heft 1 (20.9.2024), 1-11, 12.2024

Creator
Baker, Kaiya
Brown, Hayden
Gebre, Fisseha
Xu, Jiajun
Contributor
SpringerLink (Online service)

DOI
10.1007/s41871-024-00238-5
URN
urn:nbn:de:101:1-2412032101272.312257914131
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:33 AM CEST

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Associated

  • Baker, Kaiya
  • Brown, Hayden
  • Gebre, Fisseha
  • Xu, Jiajun
  • SpringerLink (Online service)

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