Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces

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Location: Deutsche Nationalbibliothek Frankfurt am Main

ISSN: 2045-2322

Extent: Online-Ressource

Language: Englisch

Notes: online resource.

Bibliographic citation: Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces ; volume:8 ; number:1 ; day:1 ; month:2 ; year:2018 ; pages:1-7 ; date:12.2018
Scientific reports ; 8, Heft 1 (1.2.2018), 1-7, 12.2018

Classification: Naturwissenschaften

Creator: Gurbán, S.

Contributor: Petrik, P.
Serényi, M.
Sulyok, A.
Menyhárd, M.
Baradács, E.
Parditka, B.
Cserháti, C.
Langer, G. A.
Erdélyi, Z.
SpringerLink (Online service)

DOI: 10.1038/s41598-018-20537-4

URN: urn:nbn:de:1111-2018041618446

Rights: Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 14.08.2025, 10:44 AM CEST

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Associated

Gurbán, S.
Petrik, P.
Serényi, M.
Sulyok, A.
Menyhárd, M.
Baradács, E.
Parditka, B.
Cserháti, C.
Langer, G. A.
Erdélyi, Z.
SpringerLink (Online service)

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Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces

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Other Objects (12)

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On the thermal properties of disordered solids at low temperatures: amorphous AsxSe1-x, compacted amorphous SiO2, and heavily doped Si:P

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Dynamic compression experiments of SiO2 and GeO2 at synchrotron- and X-ray free electron laser (XFEL) light sources

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Fig. 3. SiO2

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Turning Low-Nanoscale Intrinsic Silicon Highly Electron-Conductive by SiO2 Coating

On the thermal properties of disordered solids at low temperatures: amorphous AsxSe1-x, compacted amorphous SiO2, and heavily doped Si:P

Magnetism from Fe2O3 nanoparticles embedded in amorphous SiO2 matrix

Dynamic compression experiments of SiO2 and GeO2 at synchrotron- and X-ray free electron laser (XFEL) light sources

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Detection and characterization of attenuated multimode waveguiding in SiO2 slabs using photoemission electron microscopy

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Thermal conductivity of amorphous SiO2 thin film: A molecular dynamics study

Fig. 3. SiO2

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Turning Low-Nanoscale Intrinsic Silicon Highly Electron-Conductive by SiO2 Coating

On the thermal properties of disordered solids at low temperatures: amorphous AsxSe1-x, compacted amorphous SiO2, and heavily doped Si:P

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Thermal conductivity of amorphous SiO2 thin film: A molecular dynamics study

Fig. 3. SiO2

Effect of Different SiO2 Polymorphs on the Reaction Between SiO2 and SiC in Si Production

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