Lanthanoid Implantation for Effective Work Function Control in NMOS High‐κ∕Metal Gate Stacks
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Bibliographic citation
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In: AIP Conference Proceedings 1321 (2011), S. 237-240
- Classification
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Physik
- Keyword
-
-
- Event
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Veröffentlichung
- (where)
-
Erlangen
- (who)
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Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
- (when)
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2012
- Contributor
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Fet, Azinwi
Häublein, V.
Bauer, A. J.
Ryssel, H.
Frey, L.
- URN
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urn:nbn:de:bvb:29-opus-37402
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:50 PM CET
Data provider
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Associated
- Fet, Azinwi
- Häublein, V.
- Bauer, A. J.
- Ryssel, H.
- Frey, L.
- Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
Time of origin
- 2012
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