Hochschulschrift

X-ray optics made by X-ray lithography: Process optimization and quality control

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Location: Deutsche Nationalbibliothek Frankfurt am Main

ISBN: 9783731506799

Extent: Online-Ressourcen

Language: Englisch

Notes: Karlsruhe, Karlsruher Institut für Technologie (KIT), Dissertation, 2017

Bibliographic citation: Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik ; 36

Classification: Physik

Event: Veröffentlichung

(where): Karlsruhe

(who): KIT Scientific Publishing

(when): 2017

Creator: Koch, Frieder Johannes

Contributor: Karlsruher Institut für Technologie

DOI: 10.5445/KSP/1000070029

URN: urn:nbn:de:0072-700294

Rights: Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 15.08.2025, 7:25 AM CEST

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Hochschulschrift

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Time of origin

2017

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X-ray optics made by X-ray lithography: Process optimization and quality control

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Object type

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Time of origin

Other Objects (12)

Demagnifying X-ray lithography

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Hard X-ray waveguide optics

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X-ray waveguide optics : beyond straight channels

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Hard X-ray waveguide optics

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X-ray waveguide optics : beyond straight channels

X-ray waveguide optics : Beyond straight channels

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