Simulation of the optical coating deposition

Abstract: A brief review of the mathematical methods of thin-film growth simulation and results of their applications is presented. Both full-atomistic and multi-scale approaches that were used in the studies of thin-film deposition are considered. The results of the structural parameter simulation including density profiles, roughness, porosity, point defect concentration, and others are discussed. The application of the quantum level methods to the simulation of the thin-film electronic and optical properties is considered. Special attention is paid to the simulation of the silicon dioxide thin films.

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
Online-Ressource
Language
Englisch

Bibliographic citation
Simulation of the optical coating deposition ; volume:7 ; number:1-2 ; year:2018 ; pages:13-22 ; extent:10
Advanced Optical Technologies ; 7, Heft 1-2 (2018), 13-22 (gesamt 10)

Creator
Grigoriev, Fedor
Sulimov, Vladimir
Tikhonravov, Alexander

DOI
10.1515/aot-2017-0079
URN
urn:nbn:de:101:1-2405071638155.638609290251
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:49 AM CEST

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Associated

  • Grigoriev, Fedor
  • Sulimov, Vladimir
  • Tikhonravov, Alexander

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