Geometrical parameters measurement of surface functionalized micromachined micro-cantilever using optical method

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
2228-5326
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Geometrical parameters measurement of surface functionalized micromachined micro-cantilever using optical method ; volume:2 ; number:1 ; day:17 ; month:10 ; year:2012 ; pages:1-7 ; date:12.2012
International nano letters ; 2, Heft 1 (17.10.2012), 1-7, 12.2012

Creator
Kurhekar, Anil Sudhakar
Contributor
Apte, Prakash R.
SpringerLink (Online service)

DOI
10.1186/2228-5326-2-25
URN
urn:nbn:de:1111-2016032431325
Rights
Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:54 AM CEST

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Associated

  • Kurhekar, Anil Sudhakar
  • Apte, Prakash R.
  • SpringerLink (Online service)

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