Two-step hybrid process of movable part inside glass substrate using ultrafast laser
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2213-9621
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
online resource.
- Bibliographic citation
-
Two-step hybrid process of movable part inside glass substrate using ultrafast laser ; volume:9 ; number:1 ; day:17 ; month:12 ; year:2021 ; pages:1-8 ; date:12.2021
Micro and Nano Systems Letters ; 9, Heft 1 (17.12.2021), 1-8, 12.2021
- Creator
-
Kim, Jeongtae
Kim, Sung-Il
Joung, Yeun-Ho
Choi, Jiyeon
Koo, Chiwan
- Contributor
-
SpringerLink (Online service)
- DOI
-
10.1186/s40486-021-00142-3
- URN
-
urn:nbn:de:101:1-2022031514355450170041
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:31 AM CEST
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Kim, Jeongtae
- Kim, Sung-Il
- Joung, Yeun-Ho
- Choi, Jiyeon
- Koo, Chiwan
- SpringerLink (Online service)
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