Hochschulschrift

SiC processing technology for fabricating MOSFET devices and micromachined condenser microphones

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Location: Deutsche Nationalbibliothek Frankfurt am Main

ISBN: 9783826572531
382657253X

Dimensions: 21 cm

Extent: XVIII, 152 S.

Language: Englisch

Notes: graph. Darst.
Zugl.: Darmstadt,Techn. Univ., Diss., 2000

Keyword: MOS-FET
Siliciumcarbid
Halbleitertechnologie
Kondensatormikrofon
Siliciumcarbid
LPCVD-Verfahren
Siliciumcarbid
Halbleitertechnologie
Dünnschichttechnik
Kristallzüchtung

Event: Veröffentlichung

(where): Aachen

(who): Shaker

(when): 2000

Creator: Berberich, Stephan

Table of contents: https://d-nb.info/958667535/04

Rights: Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.

Last update: 11.06.2025, 1:52 PM CEST

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Object type

Hochschulschrift

Associated

Berberich, Stephan
Shaker

Time of origin

2000

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SiC processing technology for fabricating MOSFET devices and micromachined condenser microphones

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