Process control in low pressure capacitive radio frequency plasmas based on kinetic simulations
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
Bochum, Ruhr-Universität Bochum, Dissertation, 2023
- Schlagwort
-
Plasmadiagnostik
Niederdruckplasma
Plasmaätzen
Plasma
Plasmatechnik
Simulation
Magnetoplasma
Kapazität
- Ereignis
-
Veröffentlichung
- (wo)
-
Bochum
- (wer)
-
Ruhr-Universität Bochum
- (wann)
-
2024
- Urheber
- Beteiligte Personen und Organisationen
-
Schulze, Julian
Donko, Zoltan
Fakultät für Elektrotechnik und Informationstechnik
- URN
-
urn:nbn:de:hbz:294-108494
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:35 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Wang, Li
- Schulze, Julian
- Donko, Zoltan
- Fakultät für Elektrotechnik und Informationstechnik
- Ruhr-Universität Bochum
Entstanden
- 2024
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