- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783939718802
- Dimensions
-
23 cm, 401 g
- Extent
-
167 S.
- Language
-
Englisch
- Notes
-
Ill., graph. Darst.
Literaturangaben
- Classification
-
Elektrotechnik, Elektronik
- Keyword
-
Vistec Electron Beam GmbH
Geschichte 1950-2014
Geschichte
Elektronenstrahllithografie
Elektronenstrahllithografie
Jena
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.03.2025, 12:30 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Hahmann, Peter
- Vopelius
Time of origin
- [2014]
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