One-Step Mask-Based Diffraction Lithography for the Fabrication of 3D Suspended Structures
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
1556-276X
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
online resource.
- Bibliographic citation
-
One-Step Mask-Based Diffraction Lithography for the Fabrication of 3D Suspended Structures ; volume:13 ; number:1 ; day:5 ; month:12 ; year:2018 ; pages:1-9 ; date:12.2018
Nanoscale research letters ; 13, Heft 1 (5.12.2018), 1-9, 12.2018
- Classification
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Technische Chemie
- Creator
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Tan, Xianhua
Shi, Tielin
Lin, Jianbin
Sun, Bo
Tang, Zirong
Liao, Guanglan
- Contributor
-
SpringerLink (Online service)
- DOI
-
10.1186/s11671-018-2817-6
- URN
-
urn:nbn:de:101:1-2019012322503342371809
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:44 AM CEST
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Tan, Xianhua
- Shi, Tielin
- Lin, Jianbin
- Sun, Bo
- Tang, Zirong
- Liao, Guanglan
- SpringerLink (Online service)
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