An analytical temperature-dependent design model for contour-mode MEMS resonators and oscillators verified by measurements

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Location: Deutsche Nationalbibliothek Frankfurt am Main

Extent: Online-Ressource

Language: Englisch

Bibliographic citation: In: Sensors(18, 2018), H. 7

Classification: Elektrotechnik, Elektronik

Event: Veröffentlichung

(where): Ilmenau

(who): TU Ilmenau

(when): 2018

Creator: Stegner, Johannes
Gropp, Sebastian
Podoskin, Dmitry
Stehr, Uwe
Hoffmann, Martin
Hein, Matthias

DOI: 10.3390/s18072159

URN: urn:nbn:de:101:1-2019090506164362504020

Rights: Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 25.03.2025, 1:54 PM CET

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Associated

Stegner, Johannes
Gropp, Sebastian
Podoskin, Dmitry
Stehr, Uwe
Hoffmann, Martin
Hein, Matthias
TU Ilmenau

Time of origin

2018

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An analytical temperature-dependent design model for contour-mode MEMS resonators and oscillators verified by measurements

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