Fabrication of Nitrogen Vacancy Center‐Doped Free‐Standing Diamond Photonic Devices via Faraday Cage‐Angled Etching

Herein, methods for the fabrication of monolithic diamond integrated photonic devices via Faraday cage‐angled etching of functional epitaxial diamond layers are presented. Optimal waveguide width is determined via simulation and the fabrication of nitrogen vacancy (NV) center‐doped microring resonators is demonstrated. The performance of the devices is verified via microphotoluminescence as well as cathodoluminescence scans of the in‐grown NV centers, revealing clearly visible cavity lines. The scalable fabrication method allows for the realization of large numbers of lateral waveguide structures as needed for future applications in integrated quantum sensing devices as well as novel spin‐based quantum computers.

Object Details

• Location: Deutsche Nationalbibliothek Frankfurt am Main
• Extent: Online-Ressource
• Language: Englisch

References and Relationships

• Bibliographic citation: Fabrication of Nitrogen Vacancy Center‐Doped Free‐Standing Diamond Photonic Devices via Faraday Cage‐Angled Etching ; day:05 ; month:11 ; year:2023 ; extent:6 ; Physica status solidi / A. A, Applications and materials science ; (05.11.2023) (gesamt 6)

Contributors, Places and Time

• Creator: Giese, Christian ; Quellmalz, Patricia ; Knittel, Peter Christian ; Luo, Tingpeng ; Mathes, Niklas ; Jeske, Jan ; Reinke, Philipp ; Yang, Quankui

Further information

• DOI: 10.1002/pssa.202300433
• URN: urn:nbn:de:101:1-2023110614135125828070
• Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
• Last update: 14.08.2025, 10:54 AM CEST