Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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1432-1858
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
-
online resource.
- Bibliographic citation
-
Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators ; day:6 ; month:9 ; year:2018 ; pages:1-11
Microsystem technologies ; (6.9.2018), 1-11
- Classification
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Ingenieurwissenschaften und Maschinenbau
- Creator
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Erbes, Andreja
- Contributor
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Wang, Wentao
Weinstein, Dana
Seshia, Ashwin A.
SpringerLink (Online service)
- DOI
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10.1007/s00542-018-4118-5
- URN
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urn:nbn:de:101:1-2018102419055443823741
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:33 AM CEST
Data provider
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Associated
- Erbes, Andreja
- Wang, Wentao
- Weinstein, Dana
- Seshia, Ashwin A.
- SpringerLink (Online service)
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