Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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2045-2322
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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online resource.
- Bibliographic citation
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Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam ; volume:9 ; number:1 ; day:18 ; month:3 ; year:2019 ; pages:1-6 ; date:12.2019
Scientific reports ; 9, Heft 1 (18.3.2019), 1-6, 12.2019
- Creator
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Fu, Jiao
Zhu, Tianfei
Liang, Yan
Liu, Zhangcheng
Wang, Ruozheng
Zhang, Xiaofan
Wang, Hong-Xing
- Contributor
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SpringerLink (Online service)
- DOI
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10.1038/s41598-019-40582-x
- URN
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urn:nbn:de:101:1-2019040700335573176122
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
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14.08.2025, 10:53 AM CEST
Data provider
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Fu, Jiao
- Zhu, Tianfei
- Liang, Yan
- Liu, Zhangcheng
- Wang, Ruozheng
- Zhang, Xiaofan
- Wang, Hong-Xing
- SpringerLink (Online service)