Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
2045-2322
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam ; volume:9 ; number:1 ; day:18 ; month:3 ; year:2019 ; pages:1-6 ; date:12.2019
Scientific reports ; 9, Heft 1 (18.3.2019), 1-6, 12.2019

Creator
Fu, Jiao
Zhu, Tianfei
Liang, Yan
Liu, Zhangcheng
Wang, Ruozheng
Zhang, Xiaofan
Wang, Hong-Xing
Contributor
SpringerLink (Online service)

DOI
10.1038/s41598-019-40582-x
URN
urn:nbn:de:101:1-2019040700335573176122
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:53 AM CEST

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Associated

  • Fu, Jiao
  • Zhu, Tianfei
  • Liang, Yan
  • Liu, Zhangcheng
  • Wang, Ruozheng
  • Zhang, Xiaofan
  • Wang, Hong-Xing
  • SpringerLink (Online service)

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