Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2045-2322
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
online resource.
- Erschienen in
-
Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam ; volume:9 ; number:1 ; day:18 ; month:3 ; year:2019 ; pages:1-6 ; date:12.2019
Scientific reports ; 9, Heft 1 (18.3.2019), 1-6, 12.2019
- Urheber
-
Fu, Jiao
Zhu, Tianfei
Liang, Yan
Liu, Zhangcheng
Wang, Ruozheng
Zhang, Xiaofan
Wang, Hong-Xing
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
-
10.1038/s41598-019-40582-x
- URN
-
urn:nbn:de:101:1-2019040700335573176122
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:53 MESZ
Datenpartner
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Beteiligte
- Fu, Jiao
- Zhu, Tianfei
- Liang, Yan
- Liu, Zhangcheng
- Wang, Ruozheng
- Zhang, Xiaofan
- Wang, Hong-Xing
- SpringerLink (Online service)
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