RF power transfer efficiency and plasma parameters of low pressure high power ICPs
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: Journal of Physics D: Applied Physics, 54, 15, S. 155202-
- Ereignis
-
Veröffentlichung
- (wo)
-
Augsburg
- (wer)
-
Universität Augsburg, IOP Publishing
- (wann)
-
2021
- Urheber
- DOI
-
10.1088/1361-6463/abd8ee
- URN
-
urn:nbn:de:bvb:384-opus4-840563
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:53 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Zielke, David
- Briefi, Stefan
- Fantz, Ursel
- Universität Augsburg, IOP Publishing
Entstanden
- 2021
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