RF power transfer efficiency and plasma parameters of low pressure high power ICPs
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: Journal of Physics D: Applied Physics, 54, 15, S. 155202-
- Event
-
Veröffentlichung
- (where)
-
Augsburg
- (who)
-
Universität Augsburg, IOP Publishing
- (when)
-
2021
- Creator
- DOI
-
10.1088/1361-6463/abd8ee
- URN
-
urn:nbn:de:bvb:384-opus4-840563
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:53 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Zielke, David
- Briefi, Stefan
- Fantz, Ursel
- Universität Augsburg, IOP Publishing
Time of origin
- 2021
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