Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
2190-7439
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography ; day:14 ; month:3 ; year:2019 ; pages:1-12
Photonic sensors ; (14.3.2019), 1-12

Creator
Song, Ying
Bayanheshig
Li, Shuo
Jiang, Shan
Wang, Wei
Contributor
SpringerLink (Online service)

DOI
10.1007/s13320-019-0537-x
URN
urn:nbn:de:101:1-2019040717294059567707
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 11:00 AM CEST

Data provider

This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.

Associated

  • Song, Ying
  • Bayanheshig
  • Li, Shuo
  • Jiang, Shan
  • Wang, Wei
  • SpringerLink (Online service)

Other Objects (12)