Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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2190-7439
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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online resource.
- Bibliographic citation
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Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography ; day:14 ; month:3 ; year:2019 ; pages:1-12
Photonic sensors ; (14.3.2019), 1-12
- Creator
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Song, Ying
Bayanheshig
Li, Shuo
Jiang, Shan
Wang, Wei
- Contributor
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SpringerLink (Online service)
- DOI
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10.1007/s13320-019-0537-x
- URN
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urn:nbn:de:101:1-2019040717294059567707
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
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14.08.2025, 11:00 AM CEST
Data provider
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Song, Ying
- Bayanheshig
- Li, Shuo
- Jiang, Shan
- Wang, Wei
- SpringerLink (Online service)