Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2190-7439
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
online resource.
- Erschienen in
-
Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography ; day:14 ; month:3 ; year:2019 ; pages:1-12
Photonic sensors ; (14.3.2019), 1-12
- Urheber
-
Song, Ying
Bayanheshig
Li, Shuo
Jiang, Shan
Wang, Wei
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
-
10.1007/s13320-019-0537-x
- URN
-
urn:nbn:de:101:1-2019040717294059567707
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 11:00 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Song, Ying
- Bayanheshig
- Li, Shuo
- Jiang, Shan
- Wang, Wei
- SpringerLink (Online service)
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