Hochschulschrift
Absolute number density and kinetic analysis of CF, CF2 and C24 molecules in pulsed CF4,H2 rf plasmas
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
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Englisch
- Anmerkungen
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Greifswald, Univ., Diss., 2010
- Schlagwort
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IR-TDLAS ; Absorptionsspektroskopie ; Molekülkinetik ; Fluorkohlenstoffhaltigen Plasmen ; Hochfrequenzplasma
- Urheber
- URN
-
urn:nbn:de:gbv:9-000842-4
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:38 MESZ
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Objekttyp
- Hochschulschrift
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